Fives Lund

Fives Lund shared a development partnership with a pair of semiconductor companies for over 20 years. During this time, Lund contributed to the development of several key process technologies for semiconductor wafer processing.

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These include:

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• Electroplating

• Backside Film Etch

• Copper Backside Etch and Bevel Etch

• Supercritical 5000 psi CO2 Processing (300mm Wafer)

• Container Dry and Clean

• Wafer Clean (Single and Multi-Wafer)

• Thermal Processing Furnaces